Optical metrology

Micro & Nanopositioners

Microscopy products

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Micro Stage MT 53

 

 

Technical Data

 

MT 53-10-PM

Travel [mm] 10
Accuracy [µm] 3
Repeatability * [counts] ± 2
Relative deviation
from straightness/flatness
- over total length
[µm] ± 0.5
Max. Speed [mm/s] 5
Permissible loads Fx [N]
Fy [N]
Fz [N]
5
20
20
Weight [g] app. 100

 

 

 

Abbreviations
 

Drive

DC DC motor
SM stepping motor
PM PiezoLEG
LM piezo linear motor
EDLM

synchronous ironless linear motor

 
Measurement system
R rotary encoder
L incremental linear encoder
W

incremental angular encoder

 

Optional accessories

MM integrated motion controller
B integrated electromagnetic brake

Additional Information

Micro Stage MT 53 pdf

 

If you would like more information, please contact us.

 

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