Optical metrology

Micro & Nanopositioners

Microscopy products

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Micro Stage MT 63, MP 63

 

 

Technical Data

 

MT 63-25-DC

Travel [mm] 25
Accuracy [µm] 5
Repeatability* [µm] ± 1
Backlash [µm] 5

Relative deviation
from straightness/flatness
- over total length


[µm]

± 3 (± 1 on request)
Max. Speed [mm/s] 2.5
Permissible loads * Fx [N]
Fy [N]
Fz [N]
20
20
20
Weight [kg] 0.5

 

Abbreviations
 

Drive

DC DC motor
SM stepping motor
PM PiezoLEG
LM piezo linear motor
EDLM

synchronous ironless linear motor

 
Measurement system
R rotary encoder
L incremental linear encoder
W

incremental angular encoder

 

Optional accessories

MM integrated motion controller
B integrated electromagnetic brake

Additional Information

Micro Stage MT 63, MP 63 pdf

 

If you would like more information, please contact us.

 

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