Optical metrology

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Rotary Stage DT 105

 

 

Technical Data DT 105

 
-1LM -2LM -4LM
Travel [deg] no limit no limit no limit
Accuracy [deg] 0.005 0.005 0.005
Repeatability [deg] 0.0005 0.0005 0.0005
Number of Motors [St.] 1 2 4
Surface run out [µm] <15 <15 <15
Max. speed*
[deg/s] 180 180 180
Max. acceleration*
[deg/s2] 10000 10000 10000
Max. torque [Nm] 0.4 0.8 1.6
Permissible centric loads
Fz [N] 100 100 100
Weight [kg] 0.9 1.0 1.3



 

Abbreviations
 

Drive

DC DC motor
SM stepping motor
PM PiezoLEG
LM piezo linear motor
EDLM

synchronous ironless linear motor

 
Measurement system
R rotary encoder
L incremental linear encoder
W

incremental angular encoder

 

Optional accessories

MM integrated motion controller
B integrated electromagnetic brake

Additional Information

Rotary Stage DT 105 pdf

 

If you would like more information, please contact us.

 

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