Micro Stage MT 53

Technical Data
		MT 53-10-PM
Travel	[mm]	10
Accuracy	[µm]	3
Repeatability *	[counts]	± 2
Relative deviation from straightness/flatness - over total length	[µm]	± 0.5
Max. Speed	[mm/s]	5
Permissible loads	Fx [N] Fy [N] Fz [N]	5 20 20
Weight	[g]	app. 100

Abbreviations

Drive
DC	DC motor
SM	stepping motor
PM	PiezoLEG
LM	piezo linear motor
EDLM	synchronous ironless linear motor

Measurement system
R	rotary encoder
L	incremental linear encoder
W	incremental angular encoder

Optional accessories
MM	integrated motion controller
B	integrated electromagnetic brake

Additional Information

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