Micro Stage MT 63, MP 63

Technical Data
		MT 63-25-DC
Travel	[mm]	25
Accuracy	[µm]	5
Repeatability*	[µm]	± 1
Backlash	[µm]	5
Relative deviation from straightness/flatness - over total length	[µm]	± 3 (± 1 on request)
Max. Speed	[mm/s]	2.5
Permissible loads *	Fx [N] Fy [N] Fz [N]	20 20 20
Weight	[kg]	0.5

Abbreviations

Drive
DC	DC motor
SM	stepping motor
PM	PiezoLEG
LM	piezo linear motor
EDLM	synchronous ironless linear motor

Measurement system
R	rotary encoder
L	incremental linear encoder
W	incremental angular encoder

Optional accessories
MM	integrated motion controller
B	integrated electromagnetic brake

Additional Information

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